Batch bonding apparatus and bonding method
AssigneeShanghai Micro Electronics Equipment (Group) Co., Ltd.
InventorsXiaoyu Jiang, Hai Xia, Feibiao Chen, Song Guo
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AssigneeShanghai Micro Electronics Equipment (Group) Co., Ltd.
InventorsXiaoyu Jiang, Hai Xia, Feibiao Chen, Song Guo
Estimating the term…
A batch bonding apparatus and bonding method. The bonding apparatus comprises: a chip supply unit (10) for providing a chip (60) to be bonded; a substrate supply unit (20) for providing a substrate; a transfer unit (40) for transferring the chip (60) between the chip supply unit (10) and the substrate supply unit (20); and a pickup unit (30) disposed above the chip supply unit (10), for picking up the chip (60) from the chip supply unit (10) and uploading the chip (60) to the transfer unit (40) after flipping a marked surface of the chip (60) in a required direction. In the present invention pickup of each chip is completed individually, but transfer processes and bonding processes can be carried out for multiple chips at the same time, greatly increasing yield.
A batch bonding apparatus, comprising:
Dependencies are inferred from the claim text.