Measurement of flatness of a susceptor of a display CVD chamber

An apparatus for obtaining a flatness measurement of a susceptor, comprising:

• a flat and hard table;
• a plurality of flexible supports disposed on the table, wherein each of the flexible supports comprises:
• a first support block having a flat upper surface and a lower surface having a first aperture formed therein;
• a second support block having a flat lower surface and an upper surface having a second aperture formed therein;
• a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin;
• and
• a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide;
• and
• the susceptor overlying the plurality of flexible supports.

An apparatus for obtaining a flatness measurement of a susceptor, comprising:

• a flat and hard table;
• a plurality of flexible supports disposed on the table, wherein each of the flexible supports comprises:
• a first support block having a flat upper surface and a lower surface having a first aperture formed therein;
• a second support block having a flat lower surface and an upper surface having a second aperture formed therein;
• a support pin configured to be receivable in the first aperture and the second aperture, the support pin configured to retain the first support block and the second support block in a spaced apart relation while allowing restricted motion of the first support block relative to the second support block via deformation of the support pin;
• and
• a guide disposed between the first support block and the second support block, the guide configured to allow the first support block and the second support block to move axially relative to the guide;
• the susceptor overlying the plurality of flexible supports;
• and
• a laser above an upper surface of the susceptor.