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US 10,763,149 B2Granted
Wafer storage container
AssigneeBum Je Woo
InventorsBum Je Woo, Young Chul Kim
Life of this patent
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Abstract
The present invention relates generally to a wafer storage container, in which purge gas is supplied to a wafer stored in a storage chamber to remove fumes of the wafer or to remove moisture from the wafer, and more particularly, to a wafer storage container, in which it is possible to ensure easy injection of purge gas into a storage chamber and durability of an injection member, and it is possible to easily replace an injection member.
Claims6
A wafer storage container comprising:
- a storage chamber configured such that a wafer is stored therein through a front opening;
- and
- an injection member provided on at least a part of a circumferential surface of the storage chamber to inject purge gas into the storage chamber,
- wherein the injection member includes:
- an inlet plate provided with an internal flow path with the purge gas introduced therein;
- a wall plate coupled to a first side of the inlet plate;
- and
- a plurality of injection plates coupled to a first side of the wall plate, and provided with injection holes to inject the purge gas supplied from the internal flow path into the storage chamber,
- wherein the wall plate includes:
- a wall portion constituting at least a part of the circumferential surface of the storage chamber;
- and
- a seat portion formed recessed toward a second side of the wall portion,
- wherein the plurality of injection plates are seated in and coupled to the seat portion.
10 more elements
Dependencies are inferred from the claim text.