Semiconductor processing station
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChia-Wei Lu, Hon-Lin Huang, Hung-Chih Wang
Life of this patent
Estimating the term…
Abstract
A semiconductor processing station including a central transfer chamber, a load lock chamber disposed adjacent to the central transfer chamber, and a cooling stage disposed adjacent to the load lock chamber and the central transfer chamber is provided. The load lock chamber is adapted to contain a wafer carrier including a plurality of wafers. The central transfer chamber communicates between the cooling stage and the load lock chamber to transfer a wafer of the plurality of wafers between the cooling stage and the load lock chamber.
Claims7
A semiconductor processing station comprising:
- a central transfer chamber;
- a load lock chamber disposed adjacent to the central transfer chamber, wherein the load lock chamber contains a wafer carrier comprising a plurality of wafers, and the load lock chamber comprises:
- a sidewall;
- a cooling pipe disposed inside the load lock chamber, and the cooling pipe comprising:
- a first segment extending along the sidewall in a height direction of the load lock chamber;
- a second segment having a first end and a second end, and the second segment extending along a width direction of the load lock chamber, wherein the first segment is disposed below the second segment and connected to the first end of the second segment;
- and
- an external pipe extending from outside the load lock chamber to inside the load lock chamber, wherein the external pipe is connected to the second segment between the first end and the second end so as to provide a fluid to flow through the first segment and the second segment of the cooling pipe;
- and
- a cooling stage disposed adjacent to the load lock chamber and the central transfer chamber, wherein the central transfer chamber communicates between the cooling stage and the load lock chamber to transfer a wafer of the plurality of wafers between the cooling stage and the load lock chamber.
Dependencies are inferred from the claim text.