Vacuum transfer module and substrate processing apparatus

A substrate processing apparatus comprising:

• a vacuum transfer module, to which a load-lock module and a plurality of processing modules for processing a substrate in a vacuum atmosphere are connected, the vacuum transfer module comprising:
• a housing in which a vacuum atmosphere is generated;
• a substrate transfer unit for transferring the substrate between the load-lock module and the plurality of processing modules;
• a first adaptor for connecting the load-lock module and a second adaptor for connecting the plurality of processing modules;
• and
• a plurality of adaptor attaching portions, to which one of the first adaptor and the second adaptor is attached, provided at a sidewall of the housing, the plurality of adaptor attaching portions being common for the first adaptor and the second adaptor,
• wherein the first and the second adaptors include plate-shaped members and through-holes defining transfer ports are formed in each of the plate-shaped members, and
• wherein an arrangement of the through-holes within the plate-shaped member of the first adaptor and an arrangement of the through-holes within the plate-shaped member of the second adaptor are different from each other,
• the load-lock module;
• the plurality of processing modules;
• and
• a loader module, to which a transfer container where the substrate is stored is mounted, configured to transfer the substrate between the transfer container and the load-lock module.