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US 10,763,096 B2Granted
Method for neutralizing ion beam, and apparatus using the method
AssigneeNissin Ion Equipment Co., Ltd.
InventorYusuke Kuwata
Life of this patent
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Abstract
A method and apparatus are provided. The method includes selectively supplying a neutralizing gas to a position on a trajectory of an ion beam between an extraction electrode system and an analysis slit based on a composition of a dopant gas introduced into an ion source that produces the ion beam. The apparatus includes the ion source, the extraction electrode system, the analysis slit, and a gas supply system that selectively supplies the neutralizing gas to the position on the trajectory.
Claims11
A method comprising:
- selectively supplying a neutralizing gas to a position on a trajectory of an ion beam between an extraction electrode system and an analysis slit based on a composition of a dopant gas introduced into an ion source that produces the ion beam,
- wherein:
- in response to the dopant gas containing halogen, inhibiting a supply of the neutralizing gas to the position on the trajectory;
- and
- in response to the dopant gas containing no halogen, supplying the neutralizing gas to the position on the trajectory.
2 more elements
An apparatus comprising:
- an ion source which ionizes a dopant gas;
- an extraction electrode system which extracts ionized ions in an ion beam from the ion source;
- a mass analysis electromagnet which mass-analyzes the ion beam;
- an analysis slit disposed downstream of the mass analysis electromagnet;
- a gas supply system disposed at a position on a trajectory of the ion beam between the extraction electrode system and the analysis slit to supply a neutralizing gas to the ion beam;
- and
- a controller which inhibits a supply of the neutralizing gas to the position when the dopant gas contains halogen, and supplies the neutralizing gas to the position to neutralize the ion beam, when the dopant gas contains no halogen.
4 more elements
An apparatus comprising:
- an ion source which ionizes a dopant gas;
- an extraction electrode system which extracts an ion beam from the ion source;
- a mass analysis electromagnet which mass-analyzes the ion beam;
- an analysis slit disposed downstream of the mass analysis electromagnet;
- and
- a gas supply system configured to, based on a composition of the dopant gas, selectively supply a neutralizing gas to a position on a trajectory of the ion beam between the extraction electrode system and the analysis slit,
- wherein the gas supply system inhibits supply of the neutralizing gas in response to the dopant gas containing halogen, and supplies the neutralizing gas in response to the dopant gas not containing halogen.
4 more elements
Dependencies are inferred from the claim text.