Charged particle beam device and image processing method in charged particle beam device

A charged particle beam device comprising:

• a charged particle beam source;
• a charged particle beam optical system that irradiates each of a plurality of divided regions in an area to be observed with a charged particle beam from the charged particle beam source;
• a detector that outputs a signal caused by irradiation with the charged particle beam;
• an image processing unit that executes integration processing of image data obtained from the signal and outputting an integration image;
• and
• a display unit that displays the integrated image output during integration for each of the plurality of divided regions,
• wherein the image processing unit determines end of the integration processing according to image quality of the integrated image for each of the plurality of divided regions, and
• wherein the image processing unit changes a coefficient of the integration based on a frame count value of the integration.

An image processing method in a charged particle beam device, the image processing method comprising:

• a step of irradiating a sample with a charged particle beam from a charged particle beam source, by a charged particle beam optical system;
• a step of obtaining a signal caused by irradiation with the charged particle beam from detector;
• a step of executing integration processing of image data obtained from the signal and outputting an integrated image, by an image processing unit;
• and
• a step of displaying the integrated image output during integration,
• wherein the executing step includes executing integration computation of a luminance value and changing a coefficient of the integration based on a frame count value of the integration.