Method for operating a particle beam generator for a particle beam device and particle beam device comprising a particle beam generator

A computer program product comprising a program code which is loaded into a processor and which, when being executed, controls a particle beam device including a particle beam generator having at least one particle source configured to emit charged particles, at least one suppressor electrode configured to suppress emissions of the charged particles from a side surface of the particle source, at least one extractor electrode configured to extract the charged particles from the particle source, at least one first variable voltage supply unit for applying an extractor voltage to the extractor electrode, and at least one second variable voltage supply unit for applying a suppressor voltage to the suppressor electrode, the executed program code setting the extractor voltage to an extractor value using the first variable voltage supply unit, measuring an emission current of the particle beam generator, adjusting, when the emission current of the particle beam generator decreases, the suppressor voltage applied to the suppressor electrode using the second variable voltage supply unit such that a specific emission current of the particle beam generator is reached or maintained, and adjusting, when the emission current of the particle beam generator increases, the extractor voltage applied to the extractor electrode using the first variable voltage supply unit such that the specific emission current of the particle beam generator is reached or maintained.

A particle beam device for imaging, analyzing and/or processing an object, comprising:

• at least one particle beam generator for generating a particle beam having charged particles, wherein the particle beam generator includes at least one particle source configured to emit charged particles, at least one suppressor electrode configured to suppress emissions of the charged particles from a side surface of the particle source, at least one extractor electrode configured to extract the charged particles from the particle source, at least one first variable voltage supply unit for applying an extractor voltage to the extractor electrode, and at least one second variable voltage supply unit for applying a suppressor voltage to the suppressor electrode;
• and
• a processor into which a computer program product is loaded that sets the extractor voltage to an extractor value using the first variable voltage supply unit, measures an emission current of the particle beam generator, adjusts, when the emission current of the particle beam generator decreases, the suppressor voltage applied to the suppressor electrode using the second variable voltage supply unit such that a specific emission current of the particle beam generator is reached or maintained, and adjusts, when the emission current of the particle beam generator increases, the extractor voltage applied to the extractor electrode using the first variable voltage supply unit such that the specific emission current of the particle beam generator is reached or maintained.