Cross sectional depth composition generation utilizing scanning electron microscopy
AssigneeInternational Business Machines Corporation
InventorsEric J. Campbell, Sarah K. Czaplewski
Life of this patent
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Abstract
A method for generating cross-sectional profiles using a scanning electron microscope (SEM) includes scanning a sample with an electron beam to gather an energy-dispersive X-ray spectroscopy (EDS) spectrum for an energy level to determine element composition across an area of interest. A mesh is generated to locate positions where a depth profile will be taken. EDS spectra are gathered for energy levels at mesh locations. A number of layers of the sample are determined by distinguishing differences in chemical composition between depths as beam energies are stepped through. A depth profile is generated for the area of interest by compiling the number of layers and the element composition across the mesh.
Claims20
A system for depth profiling a sample, comprising:
- an excitation source configured to scan a sample with an excitation beam;
- at least one energy detector to gather excitation spectra for a plurality of energy levels to determine element composition and layer interfaces across an area of interest;
- and
- a data reconstruction module configured to analyze excitation spectra for the plurality of energy levels at a plurality of locations across a surface of the sample in the area of interest to generate a plurality of depth profiles, with each depth profile corresponding to each location of the plurality of locations in the area of interest by compiling, for each depth profile, a number of layers, the depths and the chemical composition for each of the number of layers.
A system for depth profiling a sample, comprising:
- a data reconstruction module configured to gather energy-dispersive X-ray spectroscopy (EDS) spectra using an applied electron beam for a plurality of energy levels at a plurality of locations across a surface of the sample to determine a number of layers and their composition at each location as beam energies are varied, the data reconstruction module further configured to generate a plurality of depth profiles, with each depth profile corresponding to each location of the plurality of locations in an area of interest.
Dependencies are inferred from the claim text.