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US 10,763,070 B2Granted
Low pressure wire ion plasma discharge source, and application to electron source with secondary emission
AssigneeLaser Systems & Solutions of Europe
InventorsPaul Ceccato, Hervé Besaucèle
Life of this patent
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Abstract
Disclosed is a low pressure wire ion plasma discharge source including an elongated ionization chamber housing at least two parallel anode wires extending longitudinally within the ionization chamber. A first of the at least two anode wires is connected to a DC voltage supply and a second of the at least two anode wires is connected to a pulsed voltage supply.
Claims6
A low pressure wire ion plasma discharge source comprising:
- an elongated ionization chamber housing at least two anode wires extending longitudinally within the ionization chamber;
- a DC voltage supply;
- and
- a pulsed voltage supply,
- wherein a first of said at least two anode wires is connected to the DC voltage supply and a second of said at least two anode wires is connected to the pulsed voltage supply simultaneously, such that a first continuous voltage is able to be continuously applied to the first anode wire while a second pulsed voltage is able to be applied to the second anode wire,
- wherein the DC voltage supply outputs the first continuous voltage and the pulsed voltage supply outputs the second pulsed voltage.
3 more elements
An electron source with secondary emission under ion bombardment in a low pressure chamber, the electron source comprising:
- a low pressure wire ion plasma discharge source comprising:
- an elongated ionization chamber housing at least two anode wires extending longitudinally within the ionization chamber,
- a DC voltage supply, and
- a pulsed voltage supply,
- wherein a first of said at least two anode wires is connected to the DC voltage supply and a second of said at least two anode wires is connected to the pulsed voltage supply simultaneously, such that a first continuous voltage is able to be continuously applied to the first anode wire while a second pulsed voltage is able to be applied to the second anode wire,
- wherein the DC voltage supply outputs the first continuous voltage and the pulsed voltage supply outputs the second pulsed voltage.
3 more elements
Dependencies are inferred from the claim text.