Switch cell having a semiconductor switch element and micro-electromechanical switch element
AssigneeSiemens Aktiengesellschaft
InventorsAnne Bauer, Werner Hartmann, Holger Schönherr
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Abstract
Various embodiments include a switch cell comprising: a semiconductor switch element; a micro-electromechanical switch element; and an electronic actuation circuit. The semiconductor switch element and the micro-electromechanical switch element are connected in parallel. In a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.
Claims11
A switch cell comprising:
- a semiconductor switch element;
- a plurality of micro-electromechanical switch elements connected in series and in parallel to form an array;
- and
- an electronic actuation circuit;
- wherein the semiconductor switch element is connected in parallel to the array and integrated together with the array on a substrate;
- and
- in a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.
A switching unit comprising a plurality of switch cells;
- wherein each switch cell comprises:
- a semiconductor switch element;
- a plurality of micro-electromechanical switch elements connected in series and in parallel to form an array;
- and
- an electronic actuation circuit;
- wherein the semiconductor switch element is connected in parallel to the array and integrated together with the array on a substrate;
- and
- in a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.
An inverter comprising a switching unit, the switching unit comprising a plurality of switch cells, wherein each switch cell comprises:
- a semiconductor switch element;
- a plurality of micro-electromechanical switch elements connected in series and in parallel to form an array;
- and
- an electronic actuation circuit;
- wherein the semiconductor switch element is connected in parallel to the array and integrated together with the array on a substrate;
- and
- in a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.
A switching device for low-voltage or medium-voltage networks comprising a switching unit comprising a plurality of switch cells;
- wherein each switch cell comprises:
- a semiconductor switch element;
- a plurality of micro-electromechanical switch elements connected in series and in parallel to form an array;
- and
- an electronic actuation circuit;
- wherein the semiconductor switch element is connected in parallel to the array and integrated together with the array on a substrate;
- and
- in a switch-off process for the switch cell, the semiconductor switch element is switched off after the micro-electromechanical switch element is switched off.
A method for operating a switch cell, the method comprising:
- switching off an array of micro-electromechanical switch elements connected in parallel and series;
- and
- after switching of the array, switching off the semiconductor switch element;
- wherein the semiconductor switch element is connected in parallel to the array and integrated together with the array on a substrate;
- and
- an electronic actuation circuit executes the switching off of the semiconductor switch element and the micro-electromechanical switch element.
Dependencies are inferred from the claim text.