Semiconductor wafer measurement method and system
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsPeng-Ren Chen, Shiang-Bau Wang, Wen-Hao Cheng, Yung-Jung Chang, Wei-Chung Hu, Yi-An Huang, Jyun-Hong Chen
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Abstract
A method includes capturing a raw image from a semiconductor wafer, assigning a measurement box in the raw image, arranging a pair of indicators in the measurement box according to graphic data system (GDS) information of the semiconductor wafer, measuring a distance between the indicators, and performing a manufacturing activity based on the measured distance.
Claims20
A method comprising:
- capturing a raw image from a semiconductor wafer;
- assigning a measurement box in the raw image;
- arranging a pair of indicators in the measurement box according to graphic data system (GDS) information of the semiconductor wafer;
- measuring a distance between the indicators;
- and
- performing a manufacturing activity based on the measured distance.
A method comprising:
- obtaining graphic data system (GDS) information corresponding to a portion of a semiconductor wafer;
- capturing a raw image from the portion of the semiconductor wafer, the raw image representing a manufacturing process corresponding to the GDS information;
- assigning a measurement box in the raw image;
- arranging a plurality of indicators in the measurement box according to the GDS information;
- and
- providing a diagnostic result based on the plurality of indicators.
A semiconductor wafer measurement system comprising processing circuitry, the processing circuitry configured to:
- obtain graphic data system (GDS) information of a layout in a semiconductor wafer;
- and
- generate a subset of the GDS information, the subset corresponding to a pattern in a layer of the semiconductor wafer,
- wherein the semiconductor wafer measurement system is configured to
- receive a raw image of the layout from an electron microscope,
- assign a measurement box in the raw image, and
- arrange a pair of indicators in the measurement box according to the subset of the GDS information.
Dependencies are inferred from the claim text.