Circuit board inspection device and circuit board inspection method

A circuit board inspection device configured to inspect a circuit board including a plurality of first electrodes extending along a predetermined first direction, and a plurality of second electrodes extending along a second direction intersecting the first direction so that the plurality of first electrodes and the plurality of second electrodes oppose each other at intersections of the plurality of first and second electrodes, the circuit board inspection device comprising:

• an AC voltage output unit configured to output a predetermined AC voltage;
• a current detecting unit configured to detect electric current;
• a plurality of first connection terminals electrically connectable respectively with the plurality of first electrodes;
• a plurality of second connection terminals electrically connectable respectively with the plurality of second electrodes;
• a measuring process unit configured to execute a measuring process of, in correspondence with a plurality of combinations obtained by respectively combining the plurality of first connection terminals and the plurality of second connection terminals, and in respect of the first and second connection terminals corresponding to each of the combinations, supplying the AC voltage to the second connection terminals by means of the AC voltage output unit and detecting electric current flowing in the first connection terminals by means of the current detection unit, to thereby acquire currents corresponding to each of the combinations;
• and
• a calculating unit configured to execute a calculating process of, based on the magnitude of the currents detected by the current detecting unit in the measuring process and on information indicating the currents' phases, calculating capacitance and resistance values corresponding to each of the combinations;
• an internal parameters memory unit storing, as internal capacitance and internal resistance values, capacitance and resistance values arising within the circuit board inspection device interior in correspondence with each of the combinations;
• wherein
• the calculating unit further executes an internal parameters correction process of correcting the capacitance and resistance values corresponding to each of the combinations, based on the internal capacitance and internal resistance values stored in the internal parameters memory unit in correspondence with each of the combinations.