Liquid crystal on silicon panel having less diffraction

A liquid crystal on silicon (LCOS) panel comprising:

• a silicon substrate having silicon circuit within the silicon substrate;
• a plurality of metal electrodes disposed on the silicon substrate, wherein the plurality of metal electrodes are periodically formed on the silicon substrate;
• a cover glass comprising a glass substrate and a transparent continuous electrode coated on the glass substrate;
• wherein each metal electrode of the plurality of metal electrodes and the transparent continuous electrode form a pixel of the LCOS panel;
• a dielectric material disposed in and filling gaps between adjacent metal electrodes;
• and
• an oxide layer disposed on the plurality of metal electrodes and the dielectric material in the gaps between adjacent metal electrodes;
• wherein a refractive index of the dielectric material is higher than a refractive index of the oxide layer;
• wherein after a planarization process the metal electrodes and the dielectric material in the gaps have the same thickness.