System and method for optimally forming gratings of diffracted optical elements

A method of forming an optical grating component, comprising:

• providing an etch stop layer atop a substrate;
• providing an optical grating layer atop the etch stop layer;
• providing a patterned mask layer over the optical grating layer;
• and
• etching the optical grating layer and the patterned mask layer to form an optical grating in the optical grating layer, wherein the optical grating comprises a plurality of angled components, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, and wherein the etching forms an area of over-etch in the etch stop layer between the plurality of angled components.

A method for forming an augmented reality/virtual reality device, the method comprising:

• providing an etch stop layer atop a substrate;
• providing an optical grating layer atop the etch stop layer;
• providing a patterned mask layer over the optical grating layer;
• and
• etching the optical grating layer and the patterned mask layer to form an optical grating in the optical grating layer, wherein the optical grating comprises a plurality of angled components, disposed at a non-zero angle of inclination with respect to a perpendicular to a plane of the substrate, and wherein the etching forms an area of over-etch recessed into the etch stop layer between the plurality of angled components.