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US 10,761,318 B2Granted
Mirror device, mirror drive method, light irradiation device, and image acquisition device
AssigneeHamamatsu Photonics K.K.
InventorAkira Takahashi
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AssigneeHamamatsu Photonics K.K.
InventorAkira Takahashi
Estimating the term…
Provided is a mirror device including a mirror which is supported to be flappable around a fast axis and supported to be flappable around a slow axis and in which a resonance frequency of flapping thereof with respect to the fast axis is a first value and a resonance frequency of the flapping thereof with respect to the slow axis is a second value lower than the first value; a signal extracting portion configured to obtain from a slow axis coil a synthesized signal including an induced signal generated in the slow axis coil due to an operation of flapping the mirror around the fast axis and configured to extract the induced signal from the synthesized signal; and a signal generating portion configured to generates a driving signal so that the flapping of the mirror with respect to the fast axis is in a resonance state according to the induced signal.
A mirror device comprising:
A drive method of a mirror which is supported to be rotatable around a first drive axis and is supported to be rotatable around a second drive axis intersecting the first drive axis and in which a resonance frequency of rotating thereof with respect to the first drive axis is a first value and a resonance frequency of the rotating thereof with respect to the second drive axis is a second value lower than the first value, the method comprising:
Dependencies are inferred from the claim text.