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US 10,761,317 B2Granted
Device for swiveling a mirror element with two degrees of swiveling freedom
AssigneeCarl Zeiss SMT GmbH
InventorsMarkus Hauf, Yanko Sarov
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Abstract
A displacement device for pivoting a mirror element with two degrees of freedom of pivoting includes an electrode structure including actuator electrodes. The actuator electrodes are comb electrodes. All actuator electrodes are arranged in a single plane. The actuator electrodes form a direct drive for pivoting the mirror element.
Claims19
A displacement device, comprising:
- an electrode structure comprising actuator electrodes,
- wherein:
- the actuator electrodes comprise comb electrodes;
- all active actuator electrodes are arranged in a single plane;
- the actuator electrodes define a direct drive configured to pivot a mirror element having two degrees of freedom of pivoting;
- and
- the electrode structure has a fourfold radial symmetry.
4 more elements
An optical component, comprising:
- a micromirror with two degrees of freedom of pivoting;
- and
- a sensor device comprising a sensor electrode structure, the sensor electrode structure comprising:
- sensor transducer mirror electrodes;
- and
- sensor transducer stator electrodes,
- a voltage source configured to apply AC voltage to the transmitter electrode;
- and
- a shielding unit configured to variably shield the receiver electrode from the transmitter electrode,
- wherein:
- the sensor device is configured to capture a pivot position of a mirror element having two degrees of freedom of pivoting;
- and
- the sensor device comprises a plurality of differential sensor pairs;
- each differential sensor pair is defined by two sensor transducer stator electrodes that are opposite each other with respect to an effective pivot point of the micromirror;
- and
- each differential sensor pair defines a measurement axis along which the pivot position of the micromirror is captured.
13 more elements
Dependencies are inferred from the claim text.