High power adaptive mirror

A mirror structure for adaptive optics devices, the mirror structure comprising:

• an elastically deformable layer that deforms in response to an applied force, wherein the elastically deformable layer comprises a central portion reflective to an incident light beam;
• a support substrate positioned spaced with respect to the elastically deformable layer;
• a spacer element connected to the elastically deformable layer and to the support substrate and positioned there between, wherein the spacer element is arranged to provide a separation distance between a first inner surface and a second inner surface;
• an inner chamber at least partially defined by the elastically deformable layer, the support substrate, and the spacer element, wherein the inner chamber contains a pressurized fluid;
• an actuator system capable of causing a deformation of the central portion that counteracts a pressure of the pressurized fluid;
• wherein, in use, the central portion is deformed according to profiles to control the incident light beam
• wherein the actuator system comprises one or more electrostatic actuators,
• wherein the electrostatic actuators are operatively associated with the elastically deformable layer,
• wherein the electrostatic actuators are positioned at the central portion and correspondingly associated with the support substrate,
• wherein a first actuator and a second actuator of the electrostatic actuator are adapted to respectively supply a first control voltage and a second control voltage to generate an electrostatic force field, between the elastically deformable layer and the support substrate,
• wherein the actuator system is provided with a measurement circuit connected to the electrostatic actuators, and
• wherein the measurement circuit measures sheet positions as respective inter actuator distances between the support structure and the elastically deformable layer.