Transmission lines using bending fins from local stress

A method of forming an electromagnetic waveguide, comprising:

• forming a first and second semiconductor fin on a semiconductor substrate, wherein the first and second semiconductor fins are high aspect ratio fins;
• depositing an oxide over the substrate and the first and second semiconductor fins;
• annealing the oxide, wherein annealing the oxide bends the first and second semiconductor fins toward each other;
• removing the oxide;
• and
• forming a conformal cladding layer along the surface of the first and second semiconductor fins.

An on-chip communication system, comprising:

• a first electromagnetic waveguide;
• a second electromagnetic waveguide, wherein the first and second electromagnetic waveguides each comprise:
• a first semiconductor fin extending up from a substrate;
• a second semiconductor fin extending up from the substrate, wherein a centerline of the first semiconductor fin and a centerline of the second semiconductor fin extend from the substrate at a non-orthogonal angle;
• a cavity defined by the first semiconductor fin, the second semiconductor fin, and a top surface of the substrate;
• and
• a cladding layer lining surfaces of the cavity;
• and
• a mixer communicatively coupled to the first and second electromagnetic waveguides.