Fixture de-embedding using calibration structures with open and short terminations
AssigneeAtaiTec Corporation
InventorChing-Chao Huang
Life of this patent
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Abstract
The present disclosure involves method and apparatus for de-embedding test fixture to extract the electrical behavior of device under test. A calibration board with both “1× open” and “1× short” test structures is fabricated and measured by equipment such as vector network analyzer that produces S parameters. The S parameters of “1× open” and “1× short”, with or without correction factors, are combined to produce the S parameters of equivalent “2× thru” test structure. The S parameters of equivalent “2× thru” are used subsequently to de-embed the test fixture. This present disclosure gives a simpler and more accurate method to create the S parameters of “2× thru” for de-embedding.
Claims20
A non-transitory computer readable medium, storing instructions for executing a process, the instructions comprising:
- determining first S parameters of a device under test (DUT) connected to a test fixture;
- determining second S parameters of a 1× open test structure;
- determining third S parameters of a 1× short test structure;
- constructing fourth S parameters of a 2× thru test structure from the second S parameters and the third S parameters;
- and
- de-embedding the test fixture based on the first S parameters and the fourth S parameters to generate fifth S parameters of the DUT.
An apparatus, comprising:
- a processor, configured to:
- determine first S parameters of a device under test (DUT) connected to a test fixture;
- determine second S parameters of a 1× open test structure;
- determine third S parameters of a 1× short test structure;
- construct fourth S parameters of a 2× thru test structure from the second S parameters and the third S parameters;
- and
- de-embed the test fixture based on the first S parameters and the fourth S parameters to generate fifth S parameters of the DUT.
A system for de-embedding the test fixture and extracting the S parameters of device under test (DUT) comprising:
- a DUT and test fixture assembly connected to a first apparatus configured to produce first S parameters;
- a calibration board comprising a 1× open test structure and a 1× short test structure;
- a second apparatus configured to combine second S parameters of the 1× open test structure and third S parameters of the 1× short test structure to construct fourth S parameters of a 2× thru test structure;
- and
- an extractor configured to de-embed the test fixture by using the fourth S parameters to generate fifth S parameters of the DUT.
Dependencies are inferred from the claim text.