Ferromagnetic resonance (FMR) electrical testing apparatus for spintronic devices

A method of performing a ferromagnetic resonance (FMR) measurement on a whole wafer under test (WUT) having a magnetic film or a plurality of magnetic devices formed thereon, comprising:

• providing a wafer chuck or stage on which the WUT is held, and having a first link to a controller;
• providing a RF probe having a probe tip comprised of at least one signal pathway that is configured to contact a test surface which is comprised of the magnetic film or plurality of magnetic devices;
• applying a sequence of RF input signals from a RF generator that has a second link to the controller, each RF input signal passes through the RF probe tip and comprises a different microwave frequency that is sequentially transmitted to a first location on the test surface;
• applying a magnetic field from at least one magnetic pole simultaneously with each different microwave frequency to establish a FMR condition in the test surface thereby resulting in a RF output signal for each pair of an applied microwave frequency value and an applied magnetic field value;
• and
• transmitting a sequence of RF output signals from the RF probe tip to a RF diode that is configured to convert each RF output signal to a voltage signal and to send each voltage signal to the controller, the controller determines one or more properties in the magnetic film or plurality of magnetic devices.