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US 10,761,109 B2Granted
Physical quantity sensor, inertia measurement device, vehicle positioning device, portable electronic apparatus, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorsShogo Inaba, Atsuki Naruse, Shigekazu Takagi, Tomokazu Umeno, Satoru Tanaka
Life of this patent
Estimating the term…
Abstract
A physical quantity sensor includes a substrate, an element portion disposed so as to overlap the substrate, a conductor pattern disposed on the substrate so as to face the element portion, and a protection film covering at least a part of an exposed portion of the conductor pattern exposed from element portion in a plan view from a direction in which the substrate and the element portion overlap.
Claims20
A physical quantity sensor comprising:
- a substrate;
- an element portion overlapping the substrate;
- a conductor pattern disposed directly on the substrate and including a central region opposed to and facing the element portion;
- and
- a protection film covering at least a part of an exposed portion of the conductor pattern exposed from the element portion in a plan view from a direction in which the substrate and the element portion overlap,
- wherein the element portion includes
- a movable portion including a first mass portion and a second mass portion,
- a fixed portion attached to the substrate, and
- a beam connecting the movable portion and the fixed portion with each other, and
- the conductor pattern includes
- a first fixed electrode disposed to face the first mass portion, and
- a second fixed electrode disposed to face the second mass portion.
9 more elements
A physical quantity sensor comprising:
- a substrate;
- an element portion overlapping the substrate;
- a conductor pattern disposed directly on the substrate and including a central region opposed to and facing the element portion;
- and
- a protection film covering at least a part of an exposed portion of the conductor pattern exposed from the element portion in a plan view from a direction in which the substrate and the element portion overlap,
- wherein the element portion includes
- a fixed electrode finger fixed to the substrate, and
- a movable electrode finger which is displaceable with respect to the substrate and is disposed to face the fixed electrode finger with a gap interposed therebetween, and
- the conductor pattern includes
- a first wiring electrically connected to the fixed electrode finger, and
- a second wiring electrically connected to the movable electrode finger.
8 more elements
Dependencies are inferred from the claim text.