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US 10,760,910 B2Granted
Sensor device employing MEMS
AssigneeKabushiki Kaisha Toshiba
InventorsRyunosuke Gando, Tamio Ikehashi, Yasushi Tomizawa, Etsuji Ogawa, Shunta Maeda
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Abstract
According to one embodiment, a sensor device includes a movable body capable of vibrating, and a catch-and-release mechanism capable of catching the vibrating movable body and capable of releasing the caught movable body. The catch-and-release mechanism includes a stopper portion capable of stopping vibration of the movable body when the movable body contacts the stopper portion, and an elastic member configured to reduce a force acting between the movable body and the stopper portion.
Claims13
A sensor device comprising:
- a movable body capable of vibrating in a first direction;
- and
- a catch-and-release mechanism capable of catching and releasing the movable body, wherein
- the catch-and-release mechanism includes:
- a stopper portion capable of reducing vibration of the movable body when the movable body contacts the stopper portion;
- and
- an elastic member provided to the stopper portion and disconnectable from the movable body,
- a first distance between the movable body and the elastic member is less than a second distance between the movable body and the stopper portion in the first direction.
5 more elements
Dependencies are inferred from the claim text.