Measurement processing device, x-ray inspection apparatus, method for manufacturing structure, measurement processing method, x-ray inspection method, measurement processing program, and x-ray inspection program

A measurement processing device, comprising:

• a setting unit that sets an evaluation region on a partial region of a specimen;
• a measuring unit that controls measurement of the partial region of the specimen and obtains a shape information for the partial region of the specimen;
• an analyzing unit that analyzes the shape information only on the evaluation region being set on the partial region of the specimen;
• and
• a display that displays an analysis result superimposed on the evaluation region corresponding to only the evaluation region in order to recognize a state of the evaluation region.

An x-ray inspection apparatus, comprising:

• an x-ray source that emits x-rays to a specimen;
• a stage on which the specimen is placed;
• a detector that detects the x-ray emitted from the x-ray source and pass through the specimen;
• a setting unit that sets an evaluation region on a partial region of the specimen;
• a measuring unit that controls the x-ray source, the stage, and the detector for obtaining a shape information of the partial region of the specimen;
• an analyzing unit that analyze the shape information only on the evaluation region being set on the partial region of the specimen;
• and
• a display that displays an analysis result superimposed on the evaluation region corresponding to only the evaluation region in order to recognize a state of the evaluation region.