Shape measurement method and shape measurement device
AssigneeThe University of Electro-Communications
InventorKaoru Minoshima
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Abstract
A shape measurement method of the present invention includes: a step of irradiating a measurement object with an optical pulse train in which a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order; and a step of measuring an optical shape of the measurement object in accordance with a correspondent relation between numbers of the optical pulses of a plurality of detection target optical pulse trains after the emitted optical pulse train acts on the measurement object and a correspondent relation between the frequency distributions in the optical pulses.
Claims11
A shape measurement method comprising:
- irradiating a measurement object with an optical pulse train comprising a plurality of optical pulses that have predetermined frequency distributions on a time axis are generated chronologically in numerical order;
- and
- measuring an optical shape of the measurement object using at least two detection target optical pulse trains, each optical pulse in each of the two detection target optical pulse trains having a pulse number, wherein the optical shape of the measurement object is measured in accordance with a difference in the pulse numbers of optical pulses between the at least two detection target optical pulse trains after the optical pulse train irradiating at least two regions of the measurement object acts on the two regions of the measurement object and a frequency difference between the optical pulses,
- wherein, the difference in the pulse number and the difference in the frequency of the optical pulses are instantaneously detected on a same predetermined plane that intersects with paths of the detection target optical pulse trains at the same time.
A shape measurement device comprising:
- a light source, wherein the light source irradiates at least two regions of a measurement object with an optical pulse train with a plurality of optical pulses that have predetermined frequency distributions on a time axis are disposed chronologically in numerical order;
- a shutter, wherein the shutter cuts out at least two optical pulses of each of at least two detection target optical pulse trains after the optical pulse train emitted from the light source irradiates the at least two regions of the measurement object act on a same predetermined plane that intersects with paths of the detection target optical pulse trains, wherein each optical pulse in each of the two detection target optical pulse trains has a pulse number;
- a detector and/or an oscilloscope, wherein the detector and/or oscilloscope detects optical intensities of each of the optical pulses cut out in the predetermined plane and generates an interference signal and an interference fringe interval between each of the detection target optical pulse trains and a reference optical pulse train propagating in a propagation space with a predetermined optical path length;
- a computer, wherein the computer measures an optical shape of the measurement object in accordance with a difference in the pulse number of the optical pulses of the at least two detection target optical pulse trains after the optical pulses have been cut out by the shutter and a difference in frequency of the cut out optical pulses,
- wherein, the computer determines the difference in the pulse numbers of the cut out optical pulses and the difference in the frequency of the cut out optical pulses based on information with regard to a frequency corresponding to the interference fringe interval.
Dependencies are inferred from the claim text.