Vacuum pump with heat generation element in relation to housing
AssigneeShimadzu Corporation
InventorMamoru Shiba
Life of this patent
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Abstract
A vacuum pump comprises: a pump device configured to rotate a rotor about a rotation axis supported by a ball bearing, thereby discharging gas sucked through a pump suction port from a pump exhaust port; and a control device attached to a side surface along a direction of the rotation axis of the pump device, including an electronic circuit having a heat generation element and a housing configured to house the electronic circuit, and configured to control operation of the pump device. The heat generation element directly contacts an outer plate of the housing not contacting the pump device, and does not contact an outer plate of the housing contacting the pump device.
Claims9
A vacuum pump comprising:
- a pump device configured to rotate a rotor about a rotation axis supported by a ball bearing, thereby discharging gas sucked through a pump suction port from a pump exhaust port;
- and
- a control device attached to a side surface along a direction of the rotation axis of the pump device, including an electronic circuit having a heat generation element and a housing configured to house the electronic circuit, and configured to control operation of the pump device,
- wherein the heat generation element directly contacts an outer plate of the housing not contacting the pump device, and does not contact an outer plate of the housing contacting the pump device,
- the housing is a substantially rectangular parallelepiped body having a longitudinal direction along the direction of the rotation axis, and
- the outer plate of the housing contacting the heat generation element is an outer plate extending along the direction of the rotation axis.
A vacuum pump comprising:
- a pump device configured to rotate a rotor about a rotation axis supported by a ball bearing, thereby discharging gas sucked through a pump suction port from a pump exhaust port;
- and
- a control device attached to a side surface along a direction of the rotation axis of the pump device, including an electronic circuit having a heat generation element and a housing configured to house the electronic circuit, and configured to control operation of the pump device,
- wherein the heat generation element directly contacts an outer plate of the housing not contacting the pump device, and does not contact an outer plate of the housing contacting the pump device, and
- the outer plates are joined with each other via a high thermal resistive seal material.
Dependencies are inferred from the claim text.