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US 10,760,161 B2Granted
Inject insert for EPI chamber
AssigneeApplied Materials, Inc.
InventorsShu-Kwan Lau, Mehmet Tugrul Samir, Aaron Miller
Life of this patent
Estimating the term…
Abstract
Embodiments of the present invention provide a liner assembly including an inject insert. The inject insert enables tenability of flow parameters, such as velocity, density, direction and spatial location, across a substrate being processed. The processing gas across the substrate being processed may be specially tailored for individual processes with a liner assembly according to embodiment of the present invention.
Claims13
An inject insert, comprising:
- a monolithic body with an inner connecting surface configured to connect with a liner body, and an exterior connecting surface configured to connect with a gas delivering device, the inner connecting surface opposite the exterior connecting surface, the monolithic body having:
- a plurality of inject ports formed through the monolithic body and parallel to a first plane, each inject port forming an opening in the inner connecting surface and the exterior connecting surface and having a constant width portion, and each injection port has a centerline that extends in a single direction from the inner connecting surface to the exterior connecting surface, the plurality of inject ports creating at least:
- a first zone with a first number of inject ports of the plurality of inject ports;
- a second zone with a second number of inject ports of the plurality of inject ports, the second number of inject ports being different from the first number of inject ports;
- and
- a third zone with a third number of inject ports of the plurality of inject ports, the third number of inject ports being different from the first number of inject ports and the second number of inject ports;
- and
- a plurality of inject inlets, each of the plurality of inject inlets being connected with at least one of the plurality of inject ports, wherein at least a first inlet of the plurality of inject inlets is positioned at the outer edge of the plurality of inject inlets and comprises a first width, the first width being greater than an average width of the plurality of inject inlets;
- and
- a branch formed between at least two of the plurality of inject ports, within the monolithic body, and wherein the branch is formed upstream of the plurality of inject inlets.
7 more elements
An inject insert, comprising:
- a monolithic body with an inner connecting surface configured to connect with a liner body, and an exterior connecting surface configured to connect with a gas delivering device, the inner connecting surface opposite the exterior connecting surface, the monolithic body having:
- a plurality of inject ports formed through the monolithic body and parallel to a first plane, each inject port forming an opening in the inner connecting surface and the exterior connecting surface and having a constant width portion, and each injection port has a centerline that extends in a single direction from the inner connecting surface to the exterior connecting surface, the plurality of inject ports creating at least:
- a first zone with a first number of inject ports of the plurality of inject ports;
- a second zone with a second number of inject ports of the plurality of inject ports, the second number of inject ports being different from the first number of inject ports;
- and
- a third zone with a third number of inject ports of the plurality of inject ports, the third number of inject ports being different from the first number of inject ports and the second number of inject ports;
- and
- a plurality of inject inlets, each of the plurality of inject inlets being connected with at least one of the plurality of inject ports, wherein at least a first inlet of the plurality of inject inlets is positioned at the outer edge of the plurality of inject inlets, connects to a first inject port of the plurality of inject ports, and comprises a first width, the first width being greater than the constant width portion of the first inject port;
- and
- a branch formed between at least two of the plurality of inject ports, within the monolithic body, and wherein the branch is formed upstream of the plurality of inject inlets.
7 more elements
Dependencies are inferred from the claim text.