Method for protecting a MEMS unit against infrared investigations and MEMS unit
AssigneeRobert Bosch GmbH
InventorsMichael Curcic, Oliver Willers, Sven Zinober, Ulrich Kunz
Life of this patent
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Abstract
A method is provided for protecting a MEMS unit against infrared investigations, at least one layer being built into the structure of the MEMS unit or at least one layer being applied on a surface of the MEMS unit. The at least one layer absorbs, reflects or diffusely scatters more than 50%, in particular more than 90% of an infrared light incident upon it.
Claims13
A method for protecting a MEMS unit against infrared investigations, the method comprising:
- one of:
- (i) building at least one layer into a structure of the MEMS unit as a buried layer of the MEMS unit, or (ii) applying the at least one layer onto an inner surface of the MEMS unit facing a cavity of the MEMS unit;
- and
- reflecting more than 50% of an infrared light incident on the at least one layer, or diffusely scattering more than 50% of the infrared light incident on the at least one layer;
- wherein the at least one layer includes a metallic layer;
- wherein the MEMS unit includes a base wafer, a sensor structure, the cavity, and a sensor cap, the cavity being formed in the base wafer and the sensor cap completely covering the cavity, the sensor cap together with the base wafer completely enclosing the cavity, the sensor structure being situated in the cavity on the base wafer;
- wherein the MEMS unit is a MEMS sensor;
- wherein the metallic layer completely surrounds the sensor structure;
- and
- wherein the metallic layer is applied to and continuously covers all inside surfaces of the cavity facing the sensor structure.
A MEMS unit, including at least one of a built-in or an applied layer, the layer reflects more than 50% of an irradiated infrared light or diffusely scatters more than 50% of the irradiated infrared light, wherein the layer is built in the MEMS unit as a buried layer or the layer in on an inside surface of the MEMS unit facing a cavity of the MEMS unit, wherein the layer is a metallic layer;
- wherein the MEMS unit includes a base wafer, a sensor structure, the cavity, and a sensor cap, the cavity being formed in the base wafer and the sensor cap completely covering the cavity, the sensor cap together with the base wafer completely enclosing the cavity, the sensor structure being situated in the cavity on the base wafer;
- wherein the MEMS unit is a MEMS sensor;
- wherein the metallic layer completely surrounds the sensor structure;
- and
- wherein the metallic layer is applied to and continuously covers all inside surfaces of the cavity facing the sensor structure.
A MEMS unit, including at least one of a built-in or an applied layer, the layer reflects more than 50% of an irradiated infrared light or diffusely scatters more than 50% of the irradiated infrared light, wherein the layer is built in the MEMS unit as a buried layer or the layer in on an inside surface of the MEMS unit facing a cavity of the MEMS unit, wherein the layer is a metallic layer;
- wherein the MEMS unit includes a base wafer, a sensor structure, the cavity, and a sensor cap, the cavity being formed in the base wafer and the sensor cap completely covering the cavity, the sensor cap together with the base wafer completely enclosing the cavity, the sensor structure being situated in the cavity on the base wafer;
- wherein the MEMS unit is a MEMS sensor;
- wherein the metallic layer completely surrounds the sensor structure;
- and
- wherein the metallic layer is built into the structure of the MEMS unit as the buried layer of the MEMS unit, the buried layer being buried within the sensor cap and within the base wafer.
A method for protecting a MEMS unit against infrared investigations, the method comprising:
- one of:
- (i) building at least one layer into a structure of the MEMS unit as a buried layer of the MEMS unit, or (ii) applying the at least one layer onto an inner surface of the MEMS unit facing a cavity of the MEMS unit and
- reflecting more than 50% of an infrared light incident on the at least one layer, or diffusely scattering more than 50% of the infrared light incident on the at least one layer;
- wherein the at least one layer includes a metallic layer;
- wherein the MEMS unit includes a base wafer, a sensor structure, the cavity, and a sensor cap, the cavity being formed in the base wafer and the sensor cap completely covering the cavity, the sensor cap together with the base wafer completely enclosing the cavity, the sensor structure being situated in the cavity on the base wafer;
- wherein the MEMS unit is a MEMS sensor;
- wherein the metallic layer completely surrounds the sensor structure;
- and
- wherein the metallic layer is built into the structure of the MEMS unit as the buried layer of the MEMS unit, the buried layer being buried within the sensor cap and within the base wafer.
Dependencies are inferred from the claim text.