Wiring board manufacturing method and wiring board
AssigneeNichia Corporation
InventorsRie Maeda, Masaaki Katsumata
Life of this patent
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Abstract
A wiring board manufacturing method includes: forming a first groove structure in a first principal surface of a base by scanning with laser light in a first irradiation pattern such that the first groove structure has a first width; irradiating an inside of the first groove structure with laser light in a second irradiation pattern that is different from the first irradiation pattern to form recessed portions inside the first groove structure; and forming a first wiring pattern by filling the first groove structure with a first electrically-conductive material to form a first wiring pattern whose shape matches with a shape of the first groove structure in a top view.
Claims19
A wiring board comprising:
- a base having a first principal surface that has a first groove structure, the first groove structure having a first width;
- and
- a first wiring pattern provided inside the first groove structure,
- wherein the first groove structure has a first bottom surface that is formed by a set of a plurality of first grooves, each of the plurality of first grooves having a second width that is smaller than the first width,
- wherein the first bottom surface further has a plurality of second grooves, each of the plurality of second grooves having a third width which is smaller than the first width, and each of the plurality of second grooves extending in a direction different from an extending direction of the plurality of first grooves, and
- an upper surface of the first wiring pattern is substantially planar.
A wiring board manufacturing method comprising:
- forming a first groove structure in a first principal surface of a base by scanning with laser light in a first irradiation pattern such that the first groove structure has a first width, the forming of the first groove structure includes forming a plurality of first grooves;
- irradiating an inside of the first groove structure with laser light in a second irradiation pattern that is different from the first irradiation pattern to form recessed portions inside the first groove structure, the irradiating of the inside of the first groove structure includes forming a plurality of first recessed portions having dot shapes inside the first groove structure;
- and
- forming a first wiring pattern by filling the first groove structure with a first electrically-conductive material to form a first wiring pattern whose shape matches with a shape of the first groove structure in a top view, the forming of the first wiring pattern includes filling the first electrically-conductive material in the plurality of first recessed portions.
Dependencies are inferred from the claim text.