US 10,757,331 B2 · Camera posture estimation method and substrate processing apparatus

Abstract

A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object includes removing the remaining background other than a substrate and performing ellipse fitting, adjusting a yaw direction of the camera by using a difference between the center of a camera image and the center of an elliptical substrate image obtained by performing the ellipse fitting, adjusting a roll direction of the camera by using a tilt angle of an ellipse in the elliptical substrate image obtained by performing the ellipse fitting, and adjusting a pitch direction of the camera by using a ratio of a minor axis to a major axis of the ellipse in the elliptical substrate image obtained by performing the ellipse fitting.

Claims12

Dependent claims

A method for estimating a posture of a camera installed in a substrate processing apparatus to obliquely photograph an object, the method comprising:

removing the remaining background other than a substrate and performing ellipse fitting;
adjusting a yaw direction of the camera by using a difference between the center of a camera image and the center of an elliptical substrate image obtained by performing the ellipse fitting;
adjusting a roll direction of the camera by using a tilt angle of an ellipse in the elliptical substrate image obtained by performing the ellipse fitting;
and
adjusting a pitch direction of the camera by using a ratio of a minor axis to a major axis of the ellipse in the elliptical substrate image obtained by performing the ellipse fitting.

2 more elements

An apparatus for processing a substrate, the apparatus comprising:

a process chamber having a processing space inside;
a support unit configured to support the substrate in the process chamber;
a gas supply unit configured to supply a process gas into the processing space;
a plasma source configured to generate plasma from the process gas;
a camera installed in the apparatus to obliquely photograph the substrate;
and
a controller configured to adjust a posture of the camera in a yaw, roll, or pitch direction by using the substrate supported on the support unit,
wherein the controller includes a fitting unit configured to remove the remaining background other than the substrate photographed and perform ellipse fitting.

5 more elements

Dependencies are inferred from the claim text.

Camera posture estimation method and substrate processing apparatus

Life of this patent

Camera posture estimation method and substrate processing apparatus

Life of this patent

Abstract

Claims12