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US 10,756,672 B2Granted
Varainductor having ground and floating planes
AssigneeTaiwan Seminconductor Manufacturing Co., Ltd.
InventorsYi-Hsuan Liu, Hsieh-Hung Hsieh, Chewn-Pu Jou, Fu-Lung Hsueh
Life of this patent
Estimating the term…
Abstract
A varainductor includes a signal line, a ground plane, and a floating plane over a substrate. The ground plane is disposed on a side of the signal line, and the first floating plane is disposed between the ground plane and the signal line. An array of switches includes at least two switches configured to selectively electrically connect the ground plane to the floating plane.
Claims20
A varainductor comprising:
- a signal line over a substrate;
- a first ground plane over the substrate, the first ground plane disposed on a first side of the signal line;
- a first floating plane over the substrate, the first floating plane disposed between the first ground plane and the signal line;
- and
- a first array of switches, wherein the first array of switches includes at least two switches, wherein each switch of the first array of switches configured to selectively electrically connect the first ground plane to the first floating plane, wherein the signal line, the first ground plane and the first floating plane are disposed a substantially equal distance above the substrate.
2 more elements
An apparatus comprising:
- a signal line over a substrate and having a length extending in a first direction and a width extending in a second direction, perpendicular to the first direction;
- a first ground plane over the substrate, the first ground plane disposed on a first side of the signal line, wherein the first ground plane and the signal line are a same distance from the substrate;
- a first floating plane over the substrate, the first floating plane disposed between the first ground plane and the signal line and having a length extending in the first direction and a width extending in the second direction;
- and
- a first array of switches, wherein the first array of switches includes a first switch having a first terminal electrically coupled to the first ground plane, and a second terminal electrically coupled to the first floating plane, and each switch of the first array of switches is directly electrically coupled to the first ground plane and the first floating plane for selectively electrically connecting the first ground plane to the first floating plane.
2 more elements
A varainductor comprising:
- a signal line over a substrate and having a length extending in a first direction and a width extending in a second direction, perpendicular to the first direction;
- a ground plane over the substrate, the ground plane disposed on a side of the signal line;
- a floating plane disposed between the ground plane and the signal line and having a length extending in the first direction and a width extending in the second direction, wherein the floating plane and the ground plane are a same distance from the substrate, wherein
- the ground plane comprises:
- a plurality of conductive layers displaced from one another in a direction perpendicular to a surface of the substrate, and
- at least one via electrically connecting adjacent conductive layers of the plurality of conductive layers;
- and
- a plurality of switches, wherein at least two of the plurality of switches are directly coupled to the ground plane and to the floating plane for selectively electrically connecting the ground plane to the floating plane.
5 more elements
Dependencies are inferred from the claim text.