Integrated module of acoustic wave device with active thermal compensation and an active thermal compensating method thereof

An active thermal compensating method for an integrated module of acoustic wave device with active thermal compensation, wherein said acoustic wave device comprises a first acoustic wave filter, wherein said first acoustic wave filter comprises a plurality of first acoustic wave resonators, at least one second acoustic wave resonator and a first thermal sensing acoustic wave resonator, wherein said plurality of first acoustic wave resonators and said at least one second acoustic wave resonator are formed on a first substrate, wherein each of said plurality of first acoustic wave resonators is a series acoustic wave resonator of said first acoustic wave filter, wherein each of said at least one second acoustic wave resonator is a shunt acoustic wave resonator of said first acoustic wave filter, wherein said active thermal compensating method comprises following steps of:

• sensing a first thermal variation by said first thermal sensing acoustic wave resonator;
• and
• outputting a first active thermal compensating signal to at least one first variable capacitance device by a first active adjustment circuit, wherein said first thermal sensing acoustic wave resonator is connected to said first active adjustment circuit, wherein each of said at least one first variable capacitance device is connected to said first active adjustment circuit, wherein said first active thermal compensating signal is correlated to said first thermal variation, wherein each of said at least one first variable capacitance device is connected in parallel to one of said plurality of first acoustic wave resonators and said at least one second acoustic wave resonator of said first acoustic wave filter, wherein said first active thermal compensating signal induces a first capacitance variation of each of said at least one first variable capacitance device such that said first capacitance variation of each of said at least one first variable capacitance device compensates the impact of said first thermal variation to said first acoustic wave filter of said acoustic wave device.