Crossbar reinforced semiconductor fins having reduced wiggling
AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Chi-Chun Liu, Yann Mignot, Muthumanickam Sankarapandian
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AssigneeInternational Business Machines Corporation
InventorsKangguo Cheng, Chi-Chun Liu, Yann Mignot, Muthumanickam Sankarapandian
Estimating the term…
A method for forming a silicon structure. A non-limiting example of the method includes forming at least two semiconductor fins on a substrate. A polymer brush material is formed over the fins and the substrate. A block copolymer (BCP) composed of a first polymer and a second polymer which are covalently bound together is applied over the polymer brush material, such that the first polymer and second polymer self-assemble into a plurality of interleaved first microdomains and second microdomains perpendicular to and within a trench between the fins. The first microdomains are composed of the first polymer and the second microdomains are composed of the second polymer. The second microdomains can be selectively removed.
A method for forming a semiconductor structure, the method comprising:
A method for forming a semiconductor structure, the method comprising:
Dependencies are inferred from the claim text.