Systems and methods of aberration correction for atom probe tomography

A system for generating aberration-corrected atom probe tomography images, the system comprising:

• a transmission electron microscope generating a specimen function associated with a plurality of lattice positions of ions of a specimen in a holder;
• a delay line detector mounted on the transmission electron microscope generating an image function associated with x- and y-coordinates and time of flight information for a plurality of ions of the specimen in the holder;
• and
• a processor, wherein the processor generates a transfer function based on the specimen function and the image function, wherein the transfer function comprises information relating to ion trajectory aberrations, wherein the processor generates an Atom Probe Tomography (APT) image of the specimen based on the specimen function, the image function, and the transfer function, and wherein the APT image is adjusted to correct for the ion trajectory aberrations.

An atom probe for generating aberration-corrected atom probe tomography images, the atom probe comprising:

• a transmission electron microscope generating a specimen function associated with a plurality of lattice positions of ions of a specimen in a holder;
• a delay line detector mounted on the transmission electron microscope generating an image function associated with x- and y-coordinates and time of flight information for a plurality of ions of the specimen in the holder;
• and
• a processor, wherein the processor generates a transfer function based on the specimen function and the image function, wherein the transfer function comprises information relating to ion trajectory aberrations, wherein the processor generates an Atom Probe Tomography (APT) image of the specimen based on the specimen function, the image function, and the transfer function, and wherein the APT image is adjusted to correct for the ion trajectory aberrations.