US 10,753,798 B2 · Compact wideband VUV spectrometer

Abstract

The invention relates to a compact wideband vacuum ultraviolet (VUV) and soft X-ray grazing incidence spectrometer based on a plane amplitude diffraction grating. The spectrometer enables simultaneous detection of a VUV spectrum in a positive first order of diffraction and a negative first order of diffraction. The technical result of the invention is that of recording a spectrum in a wide spectral range (3-200 nm) with a moderate spectral resolution (λ/δλ˜15-30) and with a significantly higher spectral resolution (λ/δλ˜100-200) in a narrow soft X-ray or extreme ultraviolet range with the possibility of measuring the absolute radiation output in these regions of the spectrum.

Claims19

Dependent claims

A wide-range vacuum ultraviolet (VUV) spectrometer, comprising:

an entrance slit located in a housing illuminated by a remote radiation source and emitting a radiation beam which illuminates a diffraction grating having a constant period d under a grazing angle θ, and a detector,
the diffraction grating is designed with flat reflective working faces which lie in a grating plane, and with non-reflective grooves between the working faces, whereas
the detector is capable of recording vacuum ultraviolet (VUV) spectra in a negative first (−1st) diffraction order,
wherein a detector edge defines a long-wavelength limit λ−1 of the negative first (−1st) diffraction order working spectral region.

1 more element

Dependencies are inferred from the claim text.

Compact wideband VUV spectrometer

Life of this patent

Compact wideband VUV spectrometer

Life of this patent

Abstract

Claims19