Biosensor for multi-analyte characterization
AssigneeInternational Business Machines Corporation
InventorsHariklia Deligianni, Bruce B. Doris, Steven J. Holmes, Qinghuang Lin, Roy R. Yu
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Abstract
Embodiments of the present invention are directed to a semiconductor device. A non-limiting example of the semiconductor device includes a semiconductor substrate. The semiconductor device also includes a plurality of metal nanopillars formed on the substrate. The semiconductor device also includes an amperometric sensor associated with one of the plurality of nanopillars, wherein the amperometric sensor is selective to an enzyme-active neurotransmitter. The semiconductor device also includes a resistivity sensor associated with a pair of nanopillars, wherein the resistivity sensor is selective to an analyte.
Claims10
A method of fabricating a semiconductor device, the method comprising:
- forming a plurality of nanopillars on a substrate, the plurality of nanopillars comprising a first nanopillar and a pair of adjacent nanopillars;
- forming an insulating layer on the plurality of nanopillars to generate a plurality of lined nanopillars;
- depositing an organic planarization layer on the lined nanopillars;
- forming a hardmask layer over the first nanopillar, the hardmask layer open over the pair of adjacent nanopillars, wherein the hardmask layer is patterned on the organic planarization layer to generate a masked region and an unmasked region;
- etching the organic planarization layer in the unmasked region to expose a portion of the insulating layer on a subset of the plurality of lined nanopillars;
- removing the exposed portion of the insulating layer from upper portions of the pair of adjacent nanopillars to generate exposed adjacent nanopillar portions;
- removing the hardmask layer;
- forming a resistivity sensor on the exposed adjacent nanopillar portions;
- removing the insulating layer from the first nanopillar to generate an exposed first nanopillar portion;
- and
- forming an amperometric sensor on the exposed first nanopillar portion.
Dependencies are inferred from the claim text.