Microwave plasma equipment and method of exciting plasma
AssigneeInstitute of Microelectronics, Chinese Academy of Sciences
InventorsXinyu Liu, Shengkai Wang, Yidan Tang, Yun Bai
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Abstract
A microwave plasma equipment and a method of exciting plasma are disclosed. The microwave plasma equipment includes: a plasma reaction device having a cavity in which a base support and a plasma-forming area is provided; a conversion device having gradient electrodes, the gradient electrodes being disposed inside the cavity and configured to generate a gradient electric field in the plasma-forming area; a gas supply device configured to introduce gas into the cavity of the plasma reaction device; and a microwave generating device configured to generate and transmit microwave into the cavity of the plasma reaction device.
Claims16
A microwave plasma equipment, comprising:
- a plasma reaction device having a cavity in which a base support and a plasma-forming area is provided;
- a conversion device having gradient electrodes, the gradient electrodes being disposed inside the cavity and configured to generate a gradient electric field in the plasma-forming area;
- a gas supply device configured to introduce gas into the cavity of the plasma reaction device;
- and
- a microwave generating device configured to generate and transmit microwave into the cavity of the plasma reaction device.
Dependencies are inferred from the claim text.