Resonator and resonance device

A resonator comprising:

• a first electrode and a second electrode;
• a piezoelectric film disposed between the first and second electrodes, the piezoelectric film having an upper surface that opposes the first electrode;
• a protective film comprising an insulator and disposed opposing the upper surface of the piezoelectric film with the first electrode interposed between the protective film and the upper surface of the piezoelectric film;
• a conductive film disposed opposing the upper surface of the piezoelectric film with the protective film interposed between the conductive film and the upper surface of the piezoelectric film;
• and
• a plurality of vibration arms extending from a base thereof,
• wherein the resonator is configured to vibrate in an out-of-plane bending vibration mode with at least one of the plurality of vibration arms configured to vibrate in an opposite direction from a second of the plurality of vibration arms, and
• wherein the conductive film is electrically connected to at least one of the first electrode and the second electrode.

A resonator comprising:

• a first electrode;
• a piezoelectric film disposed on the first electrode;
• a second electrode disposed on the piezoelectric film;
• a protective film comprising an insulator and disposed opposing the second electrode;
• and
• a conductive film disposed on the piezoelectric film and electrically connected to at least one of the first electrode and the second electrode;
• wherein the resonator further includes:
• a vibrating component comprising a base and a plurality of vibrating arms extending therefrom;
• a frame at least partially surrounding the vibrating component and
• at least one holding arm connecting the frame to the base of the vibrating component,
• wherein the frame comprises at least one via extending through the protective film and configured to electrically connect the conductive film to the at least one of the first electrode and the second electrode.