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US 10,748,737 B2Granted
Electron beam generation and measurement
AssigneeKLA-Tencor Corporation
InventorsKaterina Ioakeimidi, Gildardo R. Delgado, Frances Hill, Michael E. Romero, Rudy F. Garcia
Life of this patent
Estimating the term…
Abstract
A flat top laser beam is used to generate an electron beam with a photocathode that can include an alkali halide. The flat top profile can be generated using an optical array. The laser beam can be split into multiple laser beams or beamlets, each of which can have the flat top profile. A phosphor screen can be imaged to determine space charge effects or electron energy of the electron beam.
Claims17
A system comprising:
- a laser source that generates a laser beam;
- a photocathode in a path of the laser beam, wherein the photocathode generates an electron beam upon illumination with the laser beam;
- an optical array disposed in the path of the laser beam between the laser source and the photocathode, wherein the optical array is configured to provide a flat top profile to the laser beam;
- a vacuum chamber in fluid communication with the photocathode;
- a phosphor screen disposed in the vacuum chamber in a path of the electron beam a non-zero distance from a surface of the photocathode, wherein the phosphor screen includes phosphor powder;
- a translation mechanism configured to move the phosphor screen in the vacuum chamber relative to a surface of the photocathode;
- a camera configured to image the phosphor screen;
- and
- a processor configured to determine electron energy and/or space charge effects of the electron beam using an image from the camera.
6 more elements
A system comprising:
- a laser source that generates a laser beam;
- an optical array in a path of the laser beam that is configured to split the laser beam into a plurality of beamlets, wherein each of the beamlets is configured to have a flat top profile;
- a photocathode in a path of the beamlets, wherein the photocathode generates electron beams upon illumination with the beamlets;
- a vacuum chamber in fluid communication with the photocathode;
- a phosphor screen disposed in the vacuum chamber in a path of at least one of the electron beams a non-zero distance from a surface of the photocathode, wherein the phosphor screen includes phosphor powder;
- a translation mechanism configured to move the phosphor screen in the vacuum chamber relative to a surface of the photocathode;
- a camera configured to image the phosphor screen;
- and
- a processor configured to determine electron energy and/or space charge effects of the electron beam using an image from the camera.
6 more elements
A method comprising:
- directing a laser beam at a photocathode;
- converting the laser beam to have a flat top profile using an optical array in a path of the laser beam;
- generating an electron beam when the laser beam with the flat top profile illuminates the photocathode;
- translating a phosphor screen relative to the photocathode;
- directing the electron beam at the phosphor screen;
- imaging the phosphor screen using a camera;
- and
- determining, using a processor, electron energy and/or space charge effects of the electron beam using an image from the camera.
5 more elements
Dependencies are inferred from the claim text.