Micro-electro-mechanical system (MEMS) and related actuator bumps, methods of manufacture and design structures

A MEMS structure, comprising:

• a first set of wires on a substrate, comprising fixed actuator electrodes and a contact;
• a MEMS beam comprising a second set of wires above the first set of wires;
• and
• an array of mini-bumps extending from an underside of the MEMS beam and between the first set of wires and the second set of wires, wherein the array of mini-bumps prevent portions of the second set of wires from contacting the fixed actuator electrodes, upon actuation,
• wherein the array of mini-bumps are composed of a dielectric material;
• the fixed actuator electrodes comprise a first fixed actuator electrode and a second fixed actuator electrode;
• the contact is on the substrate between the first fixed actuator electrode and the second fixed actuator electrode;
• and
• upon actuation, the array of mini-bumps are pulled into contact with the first fixed actuator electrode and the second fixed actuator electrode.