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US 10,747,210 B2Granted
System and method for automating user interaction for semiconductor manufacturing equipment
AssigneeLam Research Corporation
InventorsRainer Unterguggenberger, Henry Chan, Chung-Ho Huang, Vincent Wong, David Hemker
Life of this patent
Estimating the term…
Abstract
A system includes an interface and a controller. The interface is configured to receive a state of a substrate processing tool comprising a plurality of process modules configured to process a substrate. The controller is configured to correlate the state with an input previously received by the substrate processing tool from the interface based on the state and to generate an output to control the substrate processing tool based on the correlation.
Claims33
A system comprising:
- an interface to receive a state of a substrate processing tool comprising a plurality of process modules configured to process a substrate, wherein the state of the substrate processing tool is determined based on data received from the process modules of the substrate processing tool and from a plurality of sensors associated with the substrate processing tool;
- and
- a controller coupled to the interface to:
- generate a correlation between the state of the substrate processing tool received by the interface and an input previously received by the substrate processing tool from the interface to control the substrate processing tool in response to a prior occurrence of the state;
- and
- generate an output including a response similar to the input previously received to control the substrate processing tool, based on the correlation between the state of the substrate processing tool received by the interface and the input previously received by the substrate processing tool from the interface in response to the prior occurrence of the state.
3 more elements
A method comprising:
- receiving data from a plurality of process modules of a substrate processing tool and from a plurality of sensors associated with the substrate processing tool;
- determining a state of the substrate processing tool based on the data received from the process modules and the sensors,
- generating a correlation between the state of the substrate processing tool and an input previously received by the substrate processing tool to control the substrate processing tool in response to a prior occurrence of the state;
- and
- generating an output including a response similar to the input previously received to control the substrate processing tool, based on the correlation between the state of the substrate processing tool and the input previously received by the substrate processing tool in response to the prior occurrence of the state.
2 more elements
A system comprising:
- a processor;
- and
- machine readable instructions, stored on a tangible machine readable medium, when executed by the processor, configure the processor to:
- receive data from a plurality of process modules of a substrate processing tool and from a plurality of sensors associated with the substrate processing tool;
- determine a state of the substrate processing tool based on the data received from the process modules and the sensors;
- generate a correlation between the state of the substrate processing tool and with an input previously received by the substrate processing tool to control the substrate processing tool in response to a prior occurrence of;
- and
- generate an output including a response similar to the input previously received to control the substrate processing tool, based on the correlation between the state of the substrate processing tool and the input previously received by the substrate processing tool in response to the prior occurrence of the state.
5 more elements
Dependencies are inferred from the claim text.