Transfer apparatus
AssigneeAzbil Corporation
InventorYoichi Okawa
Life of this patent
Estimating the term…
Abstract
A temperature management apparatus comprising: a temperature management furnace having a space in which an article placed and for which temperature management is carried out; rod members that include magnetic material; opposing members that respectively oppose portions of the lateral sides of the rod members and include magnetic material; drive apparatuses, which rotates the rod members around the central axis axes thereof and changes the relative positions of the rod members and the respective opposing members; and a coupling degradation monitoring unit 301 for predicting or detecting degradation in the respective coupling between the rod members and the respective opposing members.
Claims4
A transfer apparatus comprising:
- a rod-shaped member that comprises a magnetic material;
- an opposite member that is opposed to a part of a side surface of the rod-shaped member and comprises a magnetic material;
- a driving device that rotates the rod-shaped member or the opposite member about a central axis of the rod-shaped member to change a relative position between the rod-shaped member and the opposite member;
- and
- one or more processor devices that conduct synchronization loss monitoring by predicting or detecting a synchronization loss between the rod-shaped member and the opposite member based on a fluctuation of a torque of the driving device,
- wherein the driving device rotates the rod-shaped member about the central axis of the rod-shaped member, and
- the one or more processor devices calculate a load applied to the opposite member based on a difference between an external force applied to the opposite member by the driving device via the rod-shaped member and a force required to move the opposite member when no load is applied to the opposite member, and predict or detect the synchronization loss based on the calculated load.
Dependencies are inferred from the claim text.