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US 10,744,673 B2Granted
Sprayed article and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsNoriaki Hamaya, Ryoji Iida, Noboru Yamamoto
Life of this patent
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Abstract
A sprayed article is prepared by thermally spraying ceramic particles of rare earth oxide or fluoride or metal particles of W, Mo or Ta onto an outer or inner surface of a cylindrical carbon substrate to form a sprayed coating, and burning out the carbon substrate, thus leaving the ceramic or metal-base sprayed coating of cylindrical shape having a wall thickness of 0.5-5 mm.
Claims20
A method for preparing a sprayed article, comprising the steps of:
- providing a carbon substrate of cylindrical shape having outer and inner circumferential surfaces,
- thermally spraying ceramic particles of a rare earth oxide and/or rare earth fluoride or metal particles of at least one type selected from W, Mo and Ta, onto the outer or inner circumferential surface of the carbon substrate to form a sprayed coating, and
- combustion treating the coated substrate to burn out the carbon substrate, thus leaving the ceramic or metal-base sprayed coating of cylindrical shape having a wall thickness of 0.5 to 5 mm.
A method for preparing a sprayed article, comprising the steps of:
- providing a carbon substrate of cup shape having outer and inner circumferential surfaces and outer and inner bottom surfaces,
- thermally spraying ceramic particles of a rare earth oxide and/or rare earth fluoride or metal particles of at least one type selected from W, Mo and Ta, onto the outer circumferential and bottom surfaces or inner circumferential and bottom surfaces of the carbon substrate to form a sprayed coating, and
- combustion treating the coated substrate to burn out the carbon substrate, thus leaving the ceramic or metal-base sprayed coating of cup shape having a wall thickness of 0.5 to 5 mm.
Dependencies are inferred from the claim text.