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US 10,741,327 B2Granted
Inductors in BEOL with particulate magnetic cores
AssigneeInternational Business Machines Corporation
InventorsChandrasekharan Kothandaraman, Eugene J. O'Sullivan, Naigang Wang
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Abstract
An inductor device includes a conductive coil formed within a dielectric material and having a central core area within the coil. Particles are dispersed within the central core region to reduce eddy current loss and increase energy storage. The particles include magnetic properties.
Claims13
An inductor device, comprising:
- a conductive coil formed within a dielectric material and having a central core region within the coil;
- and
- a plurality of particles dispersed among a plurality of stacked layers, each layer having a different particle density, within the central core region to reduce eddy current loss and increase energy storage, the particles including magnetic properties.
Dependencies are inferred from the claim text.