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US 10,734,187 B2Granted
Target assembly, apparatus incorporating same, and method for manufacturing same
AssigneeUih-Rt US LLC
InventorJonathan S. Maltz
Life of this patent
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Abstract
A target assembly for generating radiation may comprise a target, a substrate and a window. The target may be capable of generating first radiation when impinged by a beam. The window may be at least partially permeable to the beam. The window and the substrate may form at least part of a hermetically sealed chamber and the target may be positioned in the chamber. The chamber may be filled with air having a normal or reduced content of oxygen.
Claims6
A method for manufacturing a target assembly, comprising:
- providing a substrate;
- positioning a target on the substrate, wherein the target plate is capable of generating radiation when impinged by a beam;
- installing a window plate onto the substrate under the atmospheric air to build a preliminary target assembly, wherein the window plate and the substrate forms at least part of a hermetically sealed chamber and the window plate is at least partially permeable to the beam;
- and
- heating the preliminary target assembly to a temperature approximate to a proposed working temperature of the target assembly.
2 more elements
Dependencies are inferred from the claim text.