Optical test apparatus and optical test method
AssigneeKabushiki Kaisha Toshiba
InventorsHiroshi Ohno, Hiroya Kano, Hideaki Okano
Life of this patent
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Abstract
According to one embodiment, an optical test apparatus includes a first aperture, a second aperture, an image sensor, and a first lens. The first aperture includes a first aperture plane provided with a first wavelength selecting region. The second aperture includes a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region. The image sensor is configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane. The first lens is configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane.
Claims16
An optical test apparatus comprising:
- a first aperture having a first aperture plane provided with a first wavelength selecting region;
- a second aperture having a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region;
- an image sensor configured to image a light beam passing through the first aperture plane and the second aperture plane and reaching an imaging plane;
- and
- a first lens configured to make a light beam passing through the first aperture plane and the second aperture plane be incident on the imaging plane;
- wherein a light beam imaged by the image sensor is a light beam reflected or scattered by a test object, and
- the apparatus further comprises a processing circuit configured to calculate a distance between the first lens and the test object based on an interval between a light beam position of a light beam passing through a central region of the first aperture plane and a light beam position of a light beam passing through a central region of the second aperture plane.
An optical test method comprising:
- imaging a light beam exiting from a test surface of a test object, passing through a first aperture having a first aperture plane provided with a first wavelength selecting region and a second aperture having a second aperture plane provided with a second wavelength selecting region different from the first wavelength selecting region, and reaching an imaging plane;
- and
- acquiring information concerning the test object based on an acquired light beam position or intensity of the light beam on the imaging plane,
- wherein a light beam imaged by the image sensor is a light beam reflected or scattered by the test object, and
- the method further comprises calculating a distance between the first lens and the test object based on an interval between a light beam position of a light beam passing through a central region of the first aperture plane and a light beam position of a light beam passing through a central region of the second aperture plane.
Dependencies are inferred from the claim text.