Apparatus and method for coating specimens
AssigneeRolls-Royce High Temperature Composites Inc.
InventorStephen Harris
Life of this patent
Estimating the term…
Abstract
An apparatus for coating specimens includes a reaction chamber and a plurality of reaction modules in the reaction chamber for containing specimens to be coated, where each reaction module includes a module inlet and a module outlet. A plurality of conduits are configured to be in fluid communication with at least one gas source external to the reaction chamber, and each of the conduits terminates in one of the reaction modules for delivery of gaseous reagents to the specimens to be coated. The module outlets are in fluid communication with the reaction chamber for expulsion of gaseous reaction products from the reaction modules.
Claims16
A method for coating specimens, the method comprising:
- heating a reaction chamber containing a plurality of reaction modules and a plurality of specimens to be coated, each of the reaction modules including a module inlet and a module outlet and containing at least one of the specimens;
- flowing gaseous reagents through the module inlets and into the reaction modules, the gaseous reagents chemically reacting to form coatings on the specimens;
- and
- maintaining a pressure in each of the reaction modules higher than a pressure in the reaction chamber, gaseous reaction products thereby being expelled from the reaction modules through the module outlets,
- wherein the gaseous reagents are flowed into the reaction modules through a plurality of conduits in fluid communication with one or more gas sources, each of the conduits including a single inlet and single outlet for flow of the gaseous reagents therethrough, and each of the conduits terminating within a volume defined by a different reaction module.
Dependencies are inferred from the claim text.