Thermal sensing acoustic wave resonator and acoustic wave filter having thermal sensing acoustic wave resonator
AssigneeWin Semiconductors Corp.
InventorsRe Ching Lin, Shu Hsiao Tsai, Cheng Kuo Lin, Fan Hsiu Huang, Chih-Feng Chiang, Tung-Yao Chou
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Abstract
An acoustic wave filter having thermal sensing acoustic wave resonator comprises a substrate, a plurality of series acoustic wave resonators formed on the substrate, at least one shunt acoustic wave resonator formed on the substrate and a thermal sensing acoustic wave resonator. The thermal sensing acoustic wave resonator is one of a series acoustic wave resonator and a shunt acoustic wave resonator. Thereby the thermal sensing acoustic wave resonator plays dual roles of thermal sensing and acoustic wave filtering.
Claims19
A thermal sensing acoustic wave resonator for sensing a thermal variation, wherein said thermal sensing acoustic wave resonator is one of a first series acoustic wave resonator and a first shunt acoustic wave resonator of an acoustic wave filter, wherein said thermal sensing acoustic wave resonator is formed on a substrate, wherein said thermal variation is correlated to at least one of a capacitance variation and a resonance frequency variation of said thermal sensing acoustic wave resonator, wherein said thermal sensing acoustic wave resonator plays dual roles of thermal sensing and acoustic wave filtering in said acoustic wave filter.
Dependencies are inferred from the claim text.