Electromechanical relay device

An electromechanical relay device comprising:

• a source electrode;
• a beam electrically coupled to the source electrode;
• a first drain electrode located adjacent a first contact on the beam, wherein the first contact is arranged to be separated from a second contact on the first drain electrode when the relay device is in a first condition;
• a first gate electrode arranged to cause the beam to deflect, to electrically couple the first contact and the second contact such that the device is in a second condition;
• a second gate electrode;
• and
• a second drain electrode,
• wherein the first and second contacts are each coated with a layer of nanocrystalline graphite,
• wherein the first gate electrode is located along one side of the beam and the second gate electrode is located along an opposing side of the beam,
• wherein the beam has a forked section comprising a first and a second branch,
• wherein one or more auxiliary gate electrodes are located between the first and second branches, such that the beam is arranged to be separated from the first and second drain electrodes when the device is in a first state,
• wherein the first gate electrode and an auxiliary gate electrode are arranged to impart an electrostatic force on the beam to deflect the beam to electrically couple the first branch and the first drain electrode when the device is in the second state, and
• wherein the second gate electrode and an auxiliary gate electrode are arranged to impart an electrostatic force on the beam to deflect the beam to electrically couple the second branch and the second drain electrode when the device is in the third state.