System and method for calculating substrate support temperature

A temperature controller for a substrate support in a substrate processing system, the temperature controller comprising:

• a power parameter module configured to calculate a power supplied to the substrate support;
• a coolant temperature parameter module configured to calculate a first temperature of a coolant supplied to the substrate support and second temperature of the coolant returning from the substrate support;
• a heat transfer gas parameter module configured to calculate flow rates of a heat transfer gas supplied to the substrate support;
• memory that stores data defining a correlation between (i) a temperature of the substrate support and (ii) a combination of the power supplied to the substrate support, the first temperature of the coolant, the second temperature of the coolant, and the flow rates of the heat transfer gas;
• and
• a temperature calculation module configured to
• calculate the temperature of the substrate support using the power supplied to the substrate support, the first temperature of the coolant, the second temperature of the coolant, the flow rates of the heat transfer, and the data defining the correlation between the temperature of the substrate support and the combination of the power supplied to the substrate support, the first temperature of the coolant, the second temperature of the coolant, and the flow rates of the heat transfer gas.